Perfrez® 9021C is a high performance semiconductor grade
perfluoroelastomer compound that is specially formulated for use under the
most severe thermal and chemical environments in many dry and wet processes
that is commonly found in semiconductor manufacturing. Characterised by its
low compression set, Perfrez® 9021C is a black compound which exhibits
extraordinary stability throughout temperature cycles. 9021C offers
outstanding chemical and thermal resistance with enhanced mechanical
properties, and is suited for use in the most demanding environments where
seals are exposed to reactive plasma.
Resistance to Special Environments
Where hydrofluorocarbon elastomers fail to deliver expected service life
under severe operating conditions, perfluoroelastomers (FFKM) is the product
of choice. Perfluoroelastomers can withstand corrosive oxidising agents and
acids, and resist the degrading effects of organic and inorganic bases.
Perfrez® 9021C delivers all of the exceptional properties of
perfluoroelastomers, along with excellent thermal stability for prolonged
service life at continuous service temperature of 310 degrees C.
Plasma Resistance Properties
Elastomer sealing components when exposed to reactive plasmas and corrosive
gases during wafer fabrication processes undergo degradation resulting in
weight loss. Sealing components that forms a part of the equipment used in
the production of semiconductor devices must meet the exceptionally
stringent performance requirements of low weight loss and reduced residue
formation. The generation of residue as a result of attack by plasmas causes
contamination, which is detrimental to the semiconductor devices been
manufactured.
Perfrez® 9021C is fabricated from perfluoroelastomers which are naturally
resistant to reactive plasmas and superior to most general use elastomer
sealing compounds. The plasma resistance properties of Perfrez® 9021C is
further enhanced by using compounding additives, resulting in end-products
that last for longer durations when exposed to reactive plasmas. Perfrez®
9021C exhibits lower weight loss and less degradation than similar
perfluoroelastomers compounds that have not undergone such properties
enhancements.
Low Compression Set
The extend to which a material is able to retain its form, dimensions and
elasticity upon the release of a sustained force is known as compression set
resistance. Temperature will affect a material's compression set resistance
as a higher temperature corresponds to an increase in material aging.
Perfrez® 9021C offers lower compression set resistance than other competing
products based on comparative temperature ratings.
Low Volume Swell
Volume swell is an indicator of an elastomer's fluid compatibility.
Elastomer seals, o-rings and gaskets are susceptible to swelling and
degradation as a result of the absorption of gas or fluid. Swelling
increases friction and reduces abrasion resistance and toughness, and also
results in contamination and the reduction of service life. Perfrez® 9021C
has exceptional low volume swell, as determined by chemical compatibility
tests.
Thermal and Chemical Resistance
Perfrez® 9021C satisfies all the requirements of sealing components under
the most extreme and challenging thermal and chemical environments.
Major Application
Perfrez® 9021C seals deliver all of the high performance properties of
perfluoroelastomers and is widely used by manufacturers of equipment over an
extensive range of industries.
l Chemical processing industry
l Aeronautical / aerospace
l Petrochemical
l Pharmaceutical and food industry
l Semiconductor fabrication
l Oil and gas extraction and processing
l Power generation
l Hydrocarbon processing
More Benefits
Perfrez® 9021C sealing components offer our customers advantages by
combining product performance with dedicated service and technical support:
l Reliability translates into lower operating cost and longer intervals between
scheduled maintenance.
l Longer service life resulting in productivity increase and cost reduction.
l Increase in operational safety and reliability.
l Product standardisation resulting in inventory reduction.
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