Metric O-Ring Size and Standard Sizes
Perfrez® 9021C Perfluoroelastomer for Semiconductor Fabrication
a high performance semiconductor grade perfluoroelastomer
compound that is specially formulated for use under the most
severe thermal and chemical environments in many dry and wet
processes that is commonly found in semiconductor manufacturing.
Characterised by its low compression set, Perfrez® 9021C is a
black compound which exhibits extraordinary stability throughout
temperature cycles. 9021C offers outstanding chemical and
thermal resistance with enhanced mechanical properties, and is
suited for use in the most demanding environments where seals
are exposed to reactive plasma.
Resistance to Special Environments
Where hydrofluorocarbon elastomers fail to deliver expected
service life under severe operating conditions,
perfluoroelastomers (FFKM) is the product of choice.
Perfluoroelastomers can withstand corrosive oxidising agents and
acids, and resist the degrading effects of organic and inorganic
bases. Perfrez® 9021C delivers all of the exceptional properties
of perfluoroelastomers, along with excellent thermal stability
for prolonged service life at continuous service temperature of
Plasma Resistance Properties
Elastomer sealing components when exposed to reactive plasmas
and corrosive gases during wafer fabrication processes undergo
degradation resulting in weight loss. Sealing components that
forms a part of the equipment used in the production of
semiconductor devices must meet the exceptionally stringent
performance requirements of low weight loss and reduced residue
formation. The generation of residue as a result of attack by
plasmas causes contamination, which is detrimental to the
semiconductor devices been manufactured.
is fabricated from perfluoroelastomers which are naturally
resistant to reactive plasmas and superior to most general use
elastomer sealing compounds. The plasma resistance properties of
Perfrez® 9021C is further enhanced by using compounding
additives, resulting in end-products that last for longer
durations when exposed to reactive plasmas. Perfrez® 9021C
exhibits lower weight loss and less degradation than similar
perfluoroelastomers compounds that have not undergone such
extend to which a material is able to retain its form,
dimensions and elasticity upon the release of a sustained force
is known as compression set resistance. Temperature will affect
a material's compression set resistance as a higher temperature
corresponds to an increase in material aging. Perfrez® 9021C
offers lower compression set resistance than other competing
products based on comparative temperature ratings.
Volume swell is an indicator of an elastomer's fluid
compatibility. Elastomer seals, o-rings and gaskets are
susceptible to swelling and degradation as a result of the
absorption of gas or fluid. Swelling increases friction and
reduces abrasion resistance and toughness, and also results in
contamination and the reduction of service life. Perfrez®
9021C has exceptional low volume swell, as determined by
chemical compatibility tests.
Thermal and Chemical Resistance
satisfies all the requirements of sealing components under the
most extreme and challenging thermal and chemical environments.
seals deliver all of the high performance properties of
perfluoroelastomers and is widely used by manufacturers of
equipment over an extensive range of industries.
Chemical processing industry
Aeronautical / aerospace
Pharmaceutical and food industry
Oil and gas extraction and processing
sealing components offer our customers advantages by
combining product performance with dedicated service and
into lower operating cost and longer intervals between scheduled
Longer service life resulting in productivity
increase and cost reduction.
Increase in operational safety and reliability.
Product standardisation resulting in inventory
Ge Mao Rubber
Industrial Co., Ltd.
No. 15, Kung Yeh East 4th Rd., Lukang, Chang Hua 505, Taiwan, R.O.C.